


| Parameter | Value |
|---|---|
| Â (Vacuum resistance) | 33 Ã 18 Ã 5.5 mm |
| Item (Vacuum resistance) | Flange |
| Seal (Vacuum resistance) | Fluorocarbon rubber (viton) |
| Type (Vacuum resistance) | Size |
| Fiber (Vacuum resistance) | Glass |
| day 3 (Vacuum resistance) | Nine hundred fifty |
| E3X-HD (Vacuum resistance) | E3NX-FA |
| Sheath (Vacuum resistance) | Fluororesin coating |
| E32-VF1 (Vacuum resistance) | E32-VF4 |
| E32-T51V (Vacuum resistance) | E32-T54V |
| Material (Vacuum resistance) | Flange |
| Sensor type (Vacuum resistance) | Size |
| Leakage rate (Vacuum resistance) | 1 Ã 10-10 Pa*m3/s max |
| Cut to length (Vacuum resistance) | Not |
| 1 channel flange (Vacuum resistance) | 96 Ã dia 30 mm max. |
| 4 channel flange (Vacuum resistance) | 80 Ã 80 Ã 49 mm |
| Ambient temperature (Vacuum resistance) | -25°C to 55°C |
| Degree of protection (Vacuum resistance) | - |
| Permissible bending radius (Vacuum resistance) | R30 |
| Flange-to-amplifier connection fiber (Vacuum resistance) | 2 m length |
Technical specifications and performance data
Installation and operation guide